VACUUM

Thermocoax offers a wide range of customised thermal solutions for vacuum applications for solar, semiconductor and industrial deposition processes, display and touch panel manufacturing processes, OLED, analysis and cryogenic applications.

Accuracy, stability and reliability

All our customised thermal solutions integrate the mineral insulated cable heaters and thermocouples manufactured in our factories.

All our thermal solutions are controlled internally using extremely precise control procedures to meet the very demanding specifications of the industries using vacuum processes.

THERMOCOAX customised electrical heating solutions are used in different vacuum applications, such as:

  • Sputtering
  • Lithography
  • Ion implant
  • CVD
  • ALD
  • PECVD
  • Patterning
  • Removing and doping
  • Bake out
  • Heat tracing

 

We offer customised electrical thermal solutions used in the main vacuum-related industrial processes:

  • Radiative heating plates and 3D designs
  • Conductive heating plates up to 1000°C
  • Heating chucks
  • Multi-zone heaters
  • Ion sources – Vaporisers
  • Valve heaters
  • 2D and 3D shaped heating cables
  • Coil heating plates
  • Ultra-high vacuum substrate heaters
  • Rod heaters
  • Silicon & glass silk jackets and cables
  • Silicon gas line heaters

The THERMOCOAX manufacturing process is fully controlled: traceability, subcontractor assessment, internal and external audits, regulatory compliance.

Thermooax Nanotech